Fabrication and synthesis

 

 

Sputtering and E-beam Combined System

Pulse Laser Deposition with in-situ RHEED System (Neocera)

Laser Molecular Beam Epitaxy system (LMBE-450A)

Pulse Laser Deposition System (PLD-450)

Magnetron Sputtering System (JGP560CC)

Ion Beam Etching System (LKJ-3D-150)

Vacuum annealing furnace (SGL-60)

Chemical Vapor Deposition System

 

 

Cleanroom

 

 

Performance characterization

Vibrating Sample Magnetometer (7407)

Ultraviolet Visible Spectrometer (U-3310)

Surface Profiler (P-7) 

Shared equipments

Atomic Force Microscope (AFM)

Superconducting Quantum Interference Device (SQUID)

Scanning Electron Microscope (JSM-7500F) 

Transmission Electron Microscope (JEM-2100)

Physical Property Measurement System (PPMS)

X-ray Diffraction (Ultima IV-185)